한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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- Pages.144.1-144.1
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- 2013
Scanning Photoelectron Microscopy Study on the Chemical State of Locally Oxidized and Hydrogenized Graphene Layer
- Km, Wondong (Korea Research Institute of Standards and Science) ;
- Byun, Iksu (Department of Physics, Konkuk University) ;
- Hwang, Inrok (Department of Physics, Konkuk University) ;
- Park, Bae Ho (Department of Physics, Konkuk University) ;
- Baek, Jaeyun (Pohang Accelerator Laboratory) ;
- Shin, Hyun-Joon (Pohang Accelerator Laboratory) ;
- Shiu, Hung Wei (National Synchrotron Radiation Research Center) ;
- Chen, Chia-Hao (National Synchrotron Radiation Research Center)
- 발행 : 2013.08.21
초록
Recently, we have developed the local oxidization and hydrogenization method for graphene layer using atomic force microscope(AFM) tip at room temperature and ambient pressure. With this method we could create locally oxidized or hydrogenized area on the graphene layer with various size from nanometer to micrometer scale, by controlling the amplitude and polarity of the voltage supplied between conducting AFM tip and the graphene layer. We investigated the chemical states of functionalized C atoms in the graphene layer using scanning photoelectron microscopy. By measuring C 1s core level X-ray Photoemission Spectra of the C atoms and suitable fitting process carried on the measured spectra, we could obtain the fraction of oxidization and hydrogenization under various condition, and the evolution of each chemical state during thermal annealing process.