Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2013.08a
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- Pages.144.2-144.2
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- 2013
Soft Lithography of Graphene Sheets Via Surface Energy Modification
- Kim, Hansun (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Jung, Min Wook (Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
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Myung, Sung
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
- Jung, Daesung (Department of Physics, Sungkyunkwan University) ;
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Lee, Sun Sook
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
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Kong, Ki-Jeong
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
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Lim, Jongsun
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology) ;
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Lee, Jong-Heun
(Department of Materials Engineering, Korea University) ;
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Park, Chong Yun
(Department of Physics, Sungkyunkwan University) ;
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An, Ki-Seok
(Thin Film Materials Research Group, Korea Research Institute of Chemical Technology)
- Published : 2013.08.21
Abstract
With the synthesis of graphene sheets as large-scale and high quality, it is essentially important to develop suitable graphene patterning process for future industrial applications. Especially, transfer or patterning method of CVD-grown graphene has been studied. We report simple soft lithographic process to develop easily applicable patterning method of large-scale graphene sheets by using chemically functionalized polymer stamp. Also important applications, the prototype capacitors with graphene electrode and commercial polymer dielectrics for the electrostatic-type touch panel are fabricated using the developed soft lithographic patterning and transfer process.