Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2012.05a
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- Pages.340-340
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- 2012
A study of electron impact dissociation of organosilicon molecules in the plasma
플라즈마 중 유기분자의 전자충격 해리과정에 관한 연구
- Published : 2012.05.31
Abstract
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