Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2012.02a
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- Pages.391-392
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- 2012
Ridge Formation by Dry-Etching of Pd and AlGaN/GaN Superlattice for the Fabrication of GaN Blue Laser Diodes
- Kim, Jae-Gwan ;
- Lee, Dong-Min ;
- Park, Min-Ju ;
- Hwang, Seong-Ju ;
- Lee, Seong-Nam ;
- Gwak, Jun-Seop ;
- Lee, Ji-Myeon
- 김재관 (순천대학교 재료금속공학과) ;
- 이동민 (순천대학교 재료금속공학과) ;
- 박민주 (순천대학교 재료금속공학과) ;
- 황성주 (순천대학교 재료금속공학과) ;
- 이성남 (한국산업기술대학교 나노-광공학과) ;
- 곽준섭 (순천대학교 재료금속공학과) ;
- 이지면 (순천대학교 재료금속공학과)
- Published : 2012.02.08
Abstract
In these days, the desire for the precise and tiny displays in mobile application has been increased strongly. Currently, laser displays ranging from large-size laser TV to mobile projectors, are commercially available or due to appear on the market [1]. In order to achieve a mobile projectors, the semiconductor laser diodes should be used as a laser source due to their size and weight. In this presentation, the continuous etch characteristics of Pd and AlGaN/GaN superlattice for the fabrication of blue laser diodes were investigated by using inductively coupled