한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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- Pages.399-399
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- 2011
Study on ZnS Thin Films Prepared by RF Magnetron Sputtering
- 발행 : 2011.08.17
초록
We studied the structural and optical characterization of zinc sulfide (ZnS) thin films by RF magnetron sputtering on glass substrates. The substrate temperature was varied in the range of 100