Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2011.05a
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- Pages.167-170
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- 2011
Oxidation of TiZrAlN nanocomposite thin films in air at temperatures between 500 and $700^{\circ}C$
TiZrAlN의 500-$700^{\circ}C$ 사이에서 공기 중 산화
- Published : 2011.05.19
Abstract
Quaternary TiZrAlN nanocomposite thin films with a composition of 20.7Ti-22.2Zr-2.7Al-54.4N (at.%) were deposited by the closed-field unbalanced magnetron sputtering (CFUBMS) method and oxidized in air at temperatures between 500 and
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