한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2011년도 제40회 동계학술대회 초록집
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- Pages.310-310
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- 2011
Molecular dynamics study on initial growth behavior of amorphous carbon film under various incidence angles
- Joe, Min-Woong (Computational Science Center, Korea Institute of Science and Technology) ;
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Moon, Myoung-Woon
(Computational Science Center, Korea Institute of Science and Technology) ;
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Lee, Kwang-Ryeol
(Computational Science Center, Korea Institute of Science and Technology)
- 발행 : 2011.02.09
초록
Morphological evolution of amorphous carbon film is investigated by molecular dynamics simulation. Here, energetic carbon atoms (75 eV) are deposited on the diamond (001) substrate to find effect of incidence angles. At normal and near-normal incidences (