Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2010.08a
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- Pages.309-309
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- 2010
$H_2$ plasma treatment effects on electrical and optical properties of the BZO (ZnO:B) thin films
- Yoo, Ha-Jin (Department of Electrophysics, Kwangwoon University) ;
- Son, Chan-Hee (Department of Electrophysics, Kwangwoon University) ;
- Choi, Joon-Ho (Department of Electrophysics, Kwangwoon University) ;
- Kang, Jung-Wook (Department of Electrophysics, Kwangwoon University) ;
- Cho, Won-Tae (Thin Film Team, Jusung Engineering Co., Ltd.) ;
- Park, Sang-Gi (Thin Film Team, Jusung Engineering Co., Ltd.) ;
- Lee, Yong-Hyun (Thin Film Team, Jusung Engineering Co., Ltd.) ;
- Choi, Eun-Ha (Department of Electrophysics, Kwangwoon University) ;
- Cho, Guang-Sup (Department of Electrophysics, Kwangwoon University) ;
- Kwon, Gi-Chung (Department of Electrophysics, Kwangwoon University)
- Published : 2010.08.18
Abstract
We have investigated the effect of
Keywords