Development of Confocal Imaging System for Wafer Inspection

개발 웨이퍼 검사위한 Confocal 이미징 시스템의 개발

Confocal Imaging System is an essential machine for a wide range of inspection wafer. For concurrent and fast acquiring the image data of four channels, the new image acquisition system used the protocol of camera-link standard with the full mode of configuration in interconnection with a frame grabber integrated in a computer, which is popularly used for many cameras, so the programming environment of image processing is optional such as Visual C++, Matlab. In addition, many conventional methods were coordinately used for contribution to build the high quality of images for precise processing analog signals of PhotoMutiplier Tubes(PMTs), accurate control of scanning device, sensitivity of PMTs, and laser source. The prototype of new image acquisition system, could meet the goal of development, it is used in LSCM for high content screening to investigation the processes of elements of living specimens at the same time by simultaneous grab image data on 4 PMTs channels.