Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.243-243
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- 2010
A study on Dry Etching for Lage Area Multi-Cystalline Silicon Solar Cell
대면적 다결정 실리콘 태양전지 제작을 위한 건식식각에 관한 연구
- Han, Kyu-Min (Chungnam National University) ;
- Su, Jin (Korea Institute of Energy Research) ;
- Yoo, Kwon-Jong (Korea Institute of Energy Research) ;
- Kwon, Jung-Young (Chunbuk national University) ;
- Choi, Sung-Jin (Korea Institute of Energy Research) ;
- Lee, Hi-Deok (Chungnam National University)
- 한규민 (충남대학교 전자.전파.정보통신공학부) ;
- 유진수 (한국에너지기술연구원 태양광연구단) ;
- 유권종 (한국에너지기술연구원 태양광연구단) ;
- 권준영 (충북대학교 전기공학과) ;
- 최성진 (한국에너지기술연구원 태양광연구단) ;
- 이희덕 (충남대학교 전자.전파.정보통신공학부)
- Published : 2010.06.16
Abstract
This paper two different etching, HF : HNO3 :DI and RIE were used for etching in multi-crystalline Silicon(Mc-Si) solar cell fabrication. The wafers etched in RIE texture showed low reflectance compared to the wafers etched in Acid soultion after SiNx deposition. In light current-voltage results, the cells etched in RIE texture exhibited higher short circuit current and open circuit voltage than those of the cells etched in acid solution. We have obtained 15.1% conversion efficiency in large area(