Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.206-206
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- 2010
Prediction of SiNx Thin Film Properties dependent on PECVD Process Parameter Using Neural Network Modeling
신경망을 이용한 PECVD 공정변수에 따른 SiNx 박막의 특성 예측
- Kim, Eun-Young (Sejong University) ;
- Yon, Sung-Yean (Sejong University) ;
- Kim, Byun-Whan (Sejong University) ;
- Kim, Jeong (Sejong University)
- Published : 2010.06.16