Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.197-197
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- 2010
Electrical properties of PZT/BFO/PZT thin film deposited with various temperature
증착 온도에 따른 PZT/BFO 박막의 전기적 특성
- Kim, Dae-Young (Kyoungsang National University) ;
- Nam, Sung-Pill (Kyoungsang National University) ;
- Noh, Hyun-Ji (Kyoungsang National University) ;
- Jo, Seo-Hyeon (Kyoungsang National University) ;
- Lee, Tae-Ho (Kyoungsang National University) ;
- Lee, Sung-Gap (Kyoungsang National University) ;
- Lee, Young-Hi (Kwangwoon University)
- Published : 2010.06.16
Abstract
Pb(Zr,Ti)O3/BiFeO3/(PZT/BFO) multilayer thin films were coated on Pt/Ti/SiO2/Si substrates by chemical solution deposition. With increasing the annealing temperature, the dielectric and leakage current density properties of multilayered PZT/BFO/PZT thin films were improved. The current density of the PZT/BFO/PZT filmannealing at