Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2010.06a
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- Pages.165-165
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- 2010
Optical and textural properties of AZO:H thin films by RF magneton sputtering system with various working pressures
- Hwang, Seung-Taek (Wonkwang University) ;
- So, Soon-Jin (Knowledge on Inc.) ;
- Park, Choon-Bae (Wonkwang University)
- ;
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- 박춘배 (원광대학교)
- Published : 2010.06.16
Abstract
AZO:H films were prepared by RF magnetron sputtering system with a AZO (2wt%