Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2010.05a
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- Pages.92-93
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- 2010
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- 1598-2548(pISSN)
Vibration experiments depending on exciter locations concerning nano-imprinting statges
가진 위치에 따른 나노 임프린트 스테이지의 진동실험
- Published : 2010.05.11
Abstract
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