한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)
권호 표지

Au nano array formed on patterened $Al_2O_3$(0006)

  • Hwang, Jae-Seong (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • Gang, Hyeon-Cheol (Chosun university) ;
  • Seo, Ok-Gyun (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • O, Pil-Geon (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • Lee, Seong-Pyo (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • Lee, Su-Yong (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • Kim, Su-Nam (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • Kim, Jae-Myeong (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • Jo, In-Hwa (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology) ;
  • No, Do-Yeong (Department of Materials Science and Engineering, Gwangju Institute of Science and Technology)
  • 발행 : 2010.02.17
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초록

The formation of Au nano particles from thin films on patterned substrates depends sensitively on film thickness and time. The nano Au line and shape formed by annealing Au films on patterned oxide substrates are different from those formed on semiconductor. In this experiment, we deposited thin Au films on patterned $Al_2O_3$(0006) using E-beam evaporator, and annealed them at various temperatures and thickness under various conditions by RTA. We measured behavior of the Au during annealing Au structure and shape are changed when Au film becomes thicker. The shape of the resultant Au nano particles and their coarsening process are investigated using SEM and XRD.

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