한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제38회 동계학술대회 초록집
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- Pages.190-190
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- 2010
Influence of RTA treatments on optical properties of ZnO nanorods synthesized by wet chemical method
- Shan, Qi (Department of Electronic and radio Engineering, Kyung Hee University) ;
- Ko, Y.H. (Department of Electronic and radio Engineering, Kyung Hee University) ;
- Lee, H.K. (Department of Electronic and radio Engineering, Kyung Hee University) ;
- Yu, J.S. (Department of Electronic and radio Engineering, Kyung Hee University)
- 발행 : 2010.02.17
초록
Zinc oxide is the most attractive material due to the large direct band gap (3.37 eV), excellent chemical and thermal stability, and large exciton binding energy (60 meV). Recently, ZnO nanorods were used as the high efficient antireflection coating layer of solar cells based on silicon (Si). In this reports, we studied the effects of rapid thermal annealing (RTA) treatment on optical properties of ZnO nanorods. For fabrication of ZnO nanorods, there are many methods such as hydrothermal method, sol-gel method, and metal organic chemical vapor deposition method. Among of them, we used the conventional wet chemical method which is simple and low temperature growth. In order to synthesize the ZnO nanorods, the ZnO films were deposited on Si substrate by RF magnetron sputtering at room temperature and the samples were dipped to aqua solution containing the zinc nitrate and hexamethylentetramines (HMT). The synthesis process was achieved in keeping with temperature of
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