한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제38회 동계학술대회 초록집
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- Pages.80-80
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- 2010
Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor deposition
- Kim, Y. (BK21 Physics Research Division and Center for Nanotubes and Nanostructured Composites (CNNC), Sungkyunkwan University) ;
- Song, W. (BK21 Physics Research Division and Center for Nanotubes and Nanostructured Composites (CNNC), Sungkyunkwan University) ;
- Lee, S.Y. (BK21 Physics Research Division and Center for Nanotubes and Nanostructured Composites (CNNC), Sungkyunkwan University) ;
- Jung, W. (BK21 Physics Research Division and Center for Nanotubes and Nanostructured Composites (CNNC), Sungkyunkwan University) ;
- Kim, M.K. (BK21 Physics Research Division and Center for Nanotubes and Nanostructured Composites (CNNC), Sungkyunkwan University) ;
- Jeon, C. (BK21 Physics Research Division and Center for Nanotubes and Nanostructured Composites (CNNC), Sungkyunkwan University) ;
- Park, C.Y. (BK21 Physics Research Division and Center for Nanotubes and Nanostructured Composites (CNNC), Sungkyunkwan University)
- 발행 : 2010.02.17
초록
Graphene has attracted tremendous attention for the last a few years due to it fascinating electrical, mechanical, and chemical properties. Up to now, several methods have been developed exclusively to prepare graphene, which include micromechanical cleavage, polycrystalline Ni employing chemical vapor deposition technique, solvent thermal reaction, thermal desorption of Si from SiC substrates, chemical routes via graphite intercalation compounds or graphite oxide. In particular, polycrystalline Ni foil and conventional chemical vapor deposition system have been widely used for synthesis of large-area graphene. [1-3] In this study, synthesis of mono-layer graphene on a Ni foil, the mixing ratio of hydrocarbon (
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