한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제37회 하계학술대회 초록집
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- Pages.224-224
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- 2009
Low Temperature Silicon Oxynitridation Grown by Hyperthermal Neutral Beam
- Kim, J.S. (National Fusion Research Institute) ;
- Kim, D.C. (National Fusion Research Institute) ;
- Her, J.H. (Department of Information Technology, Handong Global University) ;
- Park, Y.C. (Department of Information Technology, Handong Global University) ;
- Lee, B.J. (National Fusion Research Institute) ;
- Yoo, S.J. (National Fusion Research Institute)
- 발행 : 2009.08.19