한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2009년도 제37회 하계학술대회 초록집
- /
- Pages.223-223
- /
- 2009
The study of post annealing effects on low dielectric constant SiOC films
- Park, S.H. (Institute of Physics and Applied Physics, Yonsei University) ;
- Kim, H.J. (Institute of Physics and Applied Physics, Yonsei University) ;
- Cho, M.H. (Institute of Physics and Applied Physics, Yonsei University) ;
- Hahn, J.H. (Division of Industrial Metrology, KRISS) ;
- Lee, D.H. (R & D Center, ATTO. CO. LTD.) ;
- Kwon, Y.S. (R & D Center, ATTO. CO. LTD.) ;
- Park, S.Y. (R & D Center, ATTO. CO. LTD.) ;
- Kim, M.S. (Air Products and Chemicals, Inc)
- 발행 : 2009.08.19