Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Low Temperature Silicon Oxynitridation Grown by Hyperthermal Neutral Beam

  • Kim, J.S. (National Fusion Research Institute) ;
  • Kim, D.C. (National Fusion Research Institute) ;
  • Her, J.H. (Department of Information Technology, Handong Global University) ;
  • Park, Y.C. (Department of Information Technology, Handong Global University) ;
  • Lee, B.J. (National Fusion Research Institute) ;
  • Yoo, S.J. (National Fusion Research Institute)
  • Published : 2009.08.19
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