한국신재생에너지학회:학술대회논문집
- 한국신재생에너지학회 2009년도 추계학술대회 논문집
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- Pages.349-349
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- 2009
실리콘 박막 태양전지용 텍스처링 ZnO:Al 박막 개발
Development of textured ZnO:Al films for silicon thin film solar cells
-
조준식
(한국에너지기술연구원) ;
-
김영진
(한국에너지기술연구원) ;
-
이정철
(한국에너지기술연구원) ;
-
박상현
(한국에너지기술연구원) ;
-
송진수
(한국에너지기술연구원) ;
-
윤경훈
(한국에너지기술연구원)
-
Cho, Jun-Sik
;
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Kim, Young-Jin
;
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Lee, Jeong-Chul
;
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Park, Sang-Hyun
;
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Song, Jin-Soo
;
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Yoon, Kyoung-Hoon
- 발행 : 2009.11.25
초록
High quality ZnO:Al films were prepared on glass substrates by in-line RF magnetron sputtering and their surface morphologies were modified by wet-etching process in dilute acid solution to improve optical properties for application to silicon thin film solar cells as front electrode. The as-deposited films show a strong preferred orientation in [001] direction under our experimental conditions. A low resistivity below
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