한국신재생에너지학회:학술대회논문집
- 2009.11a
- /
- Pages.349-349
- /
- 2009
Development of textured ZnO:Al films for silicon thin film solar cells
실리콘 박막 태양전지용 텍스처링 ZnO:Al 박막 개발
-
Cho, Jun-Sik
;
-
Kim, Young-Jin
;
-
Lee, Jeong-Chul
;
-
Park, Sang-Hyun
;
-
Song, Jin-Soo
;
-
Yoon, Kyoung-Hoon
-
조준식
(한국에너지기술연구원) ;
-
김영진
(한국에너지기술연구원) ;
-
이정철
(한국에너지기술연구원) ;
-
박상현
(한국에너지기술연구원) ;
-
송진수
(한국에너지기술연구원) ;
-
윤경훈
(한국에너지기술연구원)
- Published : 2009.11.25
Abstract
High quality ZnO:Al films were prepared on glass substrates by in-line RF magnetron sputtering and their surface morphologies were modified by wet-etching process in dilute acid solution to improve optical properties for application to silicon thin film solar cells as front electrode. The as-deposited films show a strong preferred orientation in [001] direction under our experimental conditions. A low resistivity below