Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
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- Pages.457-458
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- 2009
The post annealing effect on the properties of AZO films
AZO 박막의 후 열처리에 따른 특성변화
- Ko, Ki-Han (Hanbat National University) ;
- Seo, Jae-Keun (Hanbat National University) ;
- Kim, Jae-Kwang (Hanbat National University) ;
- Cho, Hyung-Jun (Sungkyunkwan University) ;
-
Hong, Byung-You
(Sungkyunkwan University) ;
- Choi, Won-Seok (Hanbat National University)
- 고기한 (한밭대학교 전기공학과) ;
- 서재근 (한밭대학교 전기공학과) ;
- 김재광 (한밭대학교 전기공학과) ;
- 조형준 (성균관대학교 정보통신공학부) ;
-
홍병유
(성균관대학교 정보통신공학부) ;
- 최원석 (한밭대학교 전기공학과)
- Published : 2009.06.18
Abstract
In this work, transparent conducting Al-doped zinc oxide (AZO) films were prepared on Coming glass substrate by RF magnetron sputtering using an Al-doped ZnO target (Al: 2 wt.%) at room temperature and all films were deposited with athickness of 150 nm. We investigated the effects of the post-annealing temperature and the annealing ambient on structural, electrical and optical properties of AZO films. The films were annealed at temperatures ranging from 300 to