한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1542-1545
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- 2009
ITO Thin Film Deposition on Polycarbonate Substrate using In-Line DC Magnetron Sputtering
- Ahn, Min-Hyung (Department of Electronics Engineering, Kyungwon University) ;
- Li, Zhao-Hui (Department of Electronics Engineering, Kyungwon University) ;
- Choi, Kyung-Min (Department of Electronics Engineering, Kyungwon University) ;
- Im, Seung-Hyeok (Department of Electronics Engineering, Kyungwon University) ;
- Jung, Kyung-Seo (Department of Electronics Engineering, Kyungwon University) ;
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Cho, Eou-Sik
(Department of Electronics Engineering, Kyungwon University) ;
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Kwon, Sang-Jik
(Department of Electronics Engineering, Kyungwon University)
- Published : 2009.10.12
Abstract
For the application of flexible substrate to future display and new transparent devices, indium tin oxide (ITO) thin film was formed on polycarbonate(PC) substrate at room temperature by in-line sputter system. During the ITO sputtering, Ar and