한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.1399-1401
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- 2009
Study on the surface characteristics of parylene-C films in inductively coupled $O_2/CF_4$ gas plasma
- Ham, Yong-Hyun (Electronics and Telecommunications Research Institute (ETRI)) ;
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Baek, Kyu-Ha
(Electronics and Telecommunications Research Institute (ETRI)) ;
- Park, Kun-Sik (Electronics and Telecommunications Research Institute (ETRI)) ;
- Shin, Hong-Sik (Electronics and Telecommunications Research Institute (ETRI)) ;
- Yun, Ho-Jin (Electronics and Telecommunications Research Institute (ETRI)) ;
- Kwon, Kwang-Ho (Dept. Control and Instrumentation Engineering, Korea University) ;
- Do, Lee-Mi (Electronics and Telecommunications Research Institute (ETRI))
- Published : 2009.10.12
Abstract
In this article, we reported the results of etching polymonochloro-para-xylylene (parylene-C) thin films using inductively coupled plasma and