한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
- /
- Pages.1032-1035
- /
- 2009
Advances in excimer laser annealing for LTPS manufacturing
- Herbst, Ludolf (Coherent GmbH) ;
- Simon, Frank (Coherent GmbH) ;
- Paetzel, Rainer (Coherent GmbH) ;
- Chung, Suk-Hwan (The Japan Steel Works, Ltd.) ;
- Shida, Junichi (The Japan Steel Works, Ltd.)
- 발행 : 2009.10.12
초록
Several different production technologies for Low-Temperature Poly-Silicon (LTPS) have been proposed over the last years. However, finally the progress in Excimer-laser-based crystallization has lead to the best cost-to-performance ratio of LTPS manufacturing for use in active-matrix-based displays. In this paper, we report on recent and significant technical advances in light sources, optical beam deliveries and beam irradiation systems targeted at enabling ultra-uniform mura-free LTPS active-matrix backplanes while simultaneously lowering production costs and increasing throughput.