미진동 저감을 위한 복합형 전자기식 액추에이터 설계

Design of Hybrid Electromagnetic Actuator against Microvibration

A hybrid electromagnetic actuator with an air spring is designed so as to achieve the desired isolation reduce the vibration efficiency on the floor vibration. The performance specification of the hybrid electromagnetic actuator is determined based on the vibration criterion for vibration-sensitive equipment. In basic design stage of the electromagnetic actuator, the simple reluctance method is adapted to analyze magnetic circuits. The result is verified by finite element analysis using ANSYS Emag. Finally, some design parameters are optimized under several constraint conditions. Through this study, the design procedure for a specific electromagnetic actuator is set up using a simple reluctance method.