Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2009.10a
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- Pages.288-289
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- 2009
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- 1598-2548(pISSN)
A development of a vibration control test apparatus for semiconductor manufacturing machines
반도체 생산 장비용 제진 시험 장치 개발
Abstract
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