DOE를 이용한 간섭 효과를 이용한 레이저 마이크로 패턴 제작

Fabrication of Laser micro pattern using the DOE

  • Noh, J.W. (KIMM (Korea Institute of machinery & materials)) ;
  • Suh, J. (KIMM (Korea Institute of machinery & materials)) ;
  • Cho, I.H. (KIMM (Korea Institute of machinery & materials)) ;
  • Lee, J.H. (KIMM (Korea Institute of machinery & materials))
  • 발행 : 2009.06.03