Fabrication of Substrate Integrated Waveguide (SIW)-based Shielded Stripline using Silicon Anisotropic Wet-Etch and BCB-based Polymer Bonding

실리콘 이방성 습식 식각과 BCB 폴리머 접합을 이용한 기판 집적형 도파관(SIW) 기반의 차폐된 스트립선로의 제작

This paper reports on a fabrication of novel substrate integrated waveguide (SIW)-based shielded stripline applicable to the broadband transverse electromagnetic (TEM) single-mode propagation. We suggested a structure for half-SIW and half-shielded stripline, which combined through the benzocyclobutene (BCB) bonding layer. The electrical interconnection between the sidewall of anisotropic wet-etched silicon and patterned BCB layers is measured subsequent to the metalization on the side wall. The proposed SIW-based shielded stripline has great potential in terms of simple fabrication, integration with planar circuits and monolithic system fabricated on a SIW structure.