Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Package-type polarization switching antenna using silicon RF MEMS SPDT switches

실리콘 RF MEMS SPDT 스위치를 이용한 패키지 형태의 편파 스위칭 안테나

  • Hyeon, Ik-Jae (School of Electrical and Electronics Engineering, Chung-Ang University) ;
  • Chung, Jin-Woo (School of Electrical and Electronics Engineering, Chung-Ang University) ;
  • Lim, Sung-Joon (School of Electrical and Electronics Engineering, Chung-Ang University) ;
  • Kim, Jong-Man (Department of Nanosystem and Nanoprocess Engineering, Pusan National University) ;
  • Baek, Chang-Wook (School of Electrical and Electronics Engineering, Chung-Ang University)
  • 현익재 (중앙대학교 전자전기공학부) ;
  • 정진우 (중앙대학교 전자전기공학부) ;
  • 임성준 (중앙대학교 전자전기공학부) ;
  • 김종만 (부산대학교 나노시스템 공정공학과) ;
  • 백창욱 (중앙대학교 전자전기공학부)
  • Published : 2009.07.14
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Abstract

This paper presents a polarization switching antenna integrated with silicon RF MEMS SPDT switches in the form of a package. A low-loss quartz substrate made of SoQ (silicon-on-quartz) bonding is used as a dielectric material of the patch antenna, as well as a packaging lid substrate of RF MEMS switches. The packaging/antenna substrate is bonded with the bottom substrate including feeding lines and RF MEMS switches by BCB adhesive bonding, and RF energy is transmitted from signal lines to antenna by slot coupling. Through this approach, fabrication complexity and degradation of RF performances of the antenna due to the parasitic effects, which are all caused from the packaging methods, can be reduced. This structure is expected to be used as a platform for reconfigurable antennas with RF MEMS tunable components. A linear polarization switching antenna operating at 19 GHz is manufactured based on the proposed method, and the fabrication process is carefully described. The s-parameters of the fabricated antenna at each state are measured to evaluate the antenna performance.

Keywords