대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 2008년도 하계종합학술대회
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- Pages.517-518
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- 2008
Packaging 형태에 따른 CMOS ISFET pH 센서의 특성평가
Characteristics of CMOS ISFET pH sensor as packaging type
- Shin, Kyu-Sik (Nano sensor Research Center of Korea Electronics Technology Institute) ;
- Roh, Ji-Hyoung (Nano sensor Research Center of Korea Electronics Technology Institute) ;
- Cho, Nam-Kyu (Nano sensor Research Center of Korea Electronics Technology Institute) ;
- Lee, Dae-Sung (Nano sensor Research Center of Korea Electronics Technology Institute)
- 발행 : 2008.06.18
초록
Highly integrated ISFETs require the monolithic implementation of ISFETs, CMOS electronics, and additional sensors on the same chip This paper presents novel packaging type of CMOS ISFET pH sensor using standard CMOS FET chip and extended sensing membrane which is separated from CMOS FET. This proposed packaging type will make it easy to fabricate CMOS ISFET pH sensors
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