Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Characteristic of ZnO Thin Film Grown on Plastic Substrates for the Application of Transparent Electronic Devices

투명 전자 소자로의 응용을 위해 플라스틱 기판에 성장시킨 ZnO 특성

  • Lee, Jun-Pyo (Dept. of Electronics Engineering, Inha University) ;
  • Yoon, Yung-Sup (Dept. of Electronics Engineering, Inha University) ;
  • Kang, Seong-Jun (Dept. of Electrical & Semiconductor Engineering, Chonnam National University)
  • 이준표 (인하대학교 전자공학과) ;
  • 윤영섭 (인하대학교 전자공학과) ;
  • 강성준 (전남대학교 전기 및 반도체 공학과)
  • Published : 2008.06.18
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Abstract

ZnO thin films were deposited on glass and plastic substrates at different $Ar/O_2$ gas flow ratio in RF magnetron sputtering system. To investigate structural and optical properties of ZnO thin films, X-ray Diffactometer and UV-Vis Spectrometer were performed, respectively. The obtained films showed a preferred orientation the c-axis perpendicular to the substrate and transmittance above 80 % in visible range.

Keywords