Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.08a
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- Pages.156-156
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- 2008
Electrical properties of u/TaN/SiOC(-H)/p-Si(100) low-k dielectric stack
- Kim, Chang-Young (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Navamathavan, R. (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
- Lee, Heang-Seuk (Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University) ;
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Choi, Chi-Kyu
(Nano Thin Film Materials Laboratory, Department of Physics, Cheju National University)
- Published : 2008.08.20
Abstract
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