한국소성가공학회:학술대회논문집 (Proceedings of the Korean Society for Technology of Plasticity Conference)
- 한국소성가공학회 2008년도 춘계학술대회 논문집
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- Pages.273-276
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- 2008
극미세 점 구조체 제작을 위한 열간나노압입 공정에서의 평판형 PMMA의 크립현상에 관한 연구
A study on Creep of Plate PMMA in Thermal-Nanoindentation Process for Hyperfine pit structure Fabrication
- 발행 : 2008.05.08
초록
Thermoplastic resin takes place stress relaxation and creep according to temperature and time. In room temperature, time dependent deformation (TDD) of polymer was carried out at previous study. In this study, it evaluates time dependent deformation to relate temperature. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is important to control pattern depth for change of indent depth by creep when using Nanoindenter. For evaluating TDD at high temperature, it is occurred thermal-nanoindentation test by changing hold time at maximum load. Temperature is putted at