Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.02a
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- Pages.278-278
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- 2008
Characteristics of Organic-inorganic Hybrid low-k Thin Films
- Cho, S.J. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Bae, I.S. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Boo, J.H. (Department of chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2008.02.14
Abstract
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