Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.02a
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- Pages.145-145
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- 2008
Multiple Internal Reflection Fourier-Transform Infrared Spectroscopy and Its Application to ALD Mechanism Studies
- Park, Seon-Gyeong (Department of Physics, Rutgers University) ;
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Lee, Nam-Su
;
- Kim, Yun-Su
- Published : 2008.02.14
Abstract
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