Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
- /
- Pages.391-392
- /
- 2008
Thermal and Structural Design, and Absorption Layer Fabrication of Microbolometer
Microbolometer의 열적.구조적 설계 및 흡수층 공정
-
Han, Myung-Soo
(Korea Photonics Technology Institute) ;
-
Park, Young-Sik
(Korea Photonics Technology Institute) ;
-
An, Su-Chang
(Korea Photonics Technology Institute) ;
-
Kang, Tai-Young
(OCAS Corp.) ;
-
Lim, Sung-Soo
(OCAS Corp.) ;
- Lee, Hong-Ki (OCAS Corp.)
- Published : 2008.06.19
Abstract
A surface micromachined uncooled microbolometer based on the amorphous silicon was designed and fabricated. We designed the microbolometer with a pixel size of