한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

PC 기판에 저온 증착한 AZOB 박막의 두께에 따른 특성 변화

Dependance of thickness on the properties of B doped ZnO:Al (AZOB) thin film on polycarbonate (PC) substrate at room temperature

  • 유현규 (성균관대학교 정보통신공학부) ;
  • 이규일 (성균관대학교 정보통신공학부) ;
  • 이종환 (성균관대학교 정보통신공학부) ;
  • 강현일 (성균관대학교 정보통신공학부) ;
  • 이태용 (성균관대학교 정보통신공학부) ;
  • 오수영 (성균관대학교 정보통신공학부) ;
  • 송준태 (성균관대학교 정보통신공학부)
  • Yu, Hyun-Kyu (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Lee, Kyu-Il (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Lee, Jong-Hwan (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Kang, Hyun-Il (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Lee, Tae-Yong (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Oh, Su-Young (School of Information and Communication Engineering, SungKyunKwan University) ;
  • Song, Joon-Tae (School of Information and Communication Engineering, SungKyunKwan University)
  • 발행 : 2008.06.19
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초록

In this study, effect of thickness on structural, electrical and optical properties of B doped ZnO:Al (AZOB) films was investigated. AZOB films were deposited on PC substrates by DC magnetron sputtering. The thickness range of films were from 300 nm to 800 nm to identified as increasing thickness, stress between substrate and AZOB film. The. average transmittance of the films was over 80 % until 500 nm. Then a resistivity of $1.58\times10^{-3}\Omega$-cm was obtained. We presented that a AZOB film of 500 nm was optimization to obtain a high transmittance and conductivity.

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