Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.06a
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- Pages.66-66
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- 2008
Effects of Annealing Condition on Properties of ITO Thin Films Deposited on Soda Lime Glass having Barrier Layers
Barrier층을 갖는 Soda lime glass 기판위에 증착된 ITO박막의 Annealing 조건에 따른 영향
- Lee, Jung-Min (KICET, Electronic Compnents & Materials Division) ;
- Choi, Byung-Hyun (KICET, Electronic Compnents & Materials Division) ;
- Ji, Mi-Jung (KICET, Electronic Compnents & Materials Division) ;
- Park, Jung-Ho (KICET, Electronic Compnents & Materials Division) ;
- Ju, Byeong-Kwon (Korea Univ.)
- 이정민 (요업기슐원, 전자부품소재본부) ;
- 최병현 (요업기슐원, 전자부품소재본부) ;
- 지미정 (요업기슐원, 전자부품소재본부) ;
- 박정호 (요업기슐원, 전자부품소재본부) ;
- 주병권 (고려대학교)
- Published : 2008.06.19
Abstract
Most of the properties of ITO films depend on their substrate nature, deposition techniques and ITO film composition. For the display panel application, it is normally deposited on the glass substrate which has high strain point (>575 degree) and must be deposited at a temperature higher than