한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.321-321
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- 2008
PDP의 격벽 형성 공정인 감광성 공법에서 $B_2O_3-Al_2O_3-SiO_2$ 계 유리 조성의 열적 특성과 굴절률 변화
Thermal Properties and Refractive Index of $B_2O_3-Al_2O_3-SiO_2$ Glasses for Photolithographic Process of Barrier Ribs in PDP
- Hwang, Seong-Jin (School of Materials Engineering, Inha University) ;
- Won, Ju-Yeon (School of Materials Engineering, Inha University) ;
- Kim, Hyung-Sun (School of Materials Engineering, Inha University)
- 발행 : 2008.11.06
초록
To obtaingood resolution in PDP, one of the important factors is to achieve the accuracy of barrier ribs. The photolithographic process can be used to form patterns of barrier rib with high accuracy and a high aspect ratio. The composition for photolithography is based on the