한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.303-304
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- 2008
DC 마그네트론 스퍼트링법으로 제조한 ZnO:N,Al 박막의 전기적 특성에 관한연구
Electrical properties of AZO transparent conductive oxide with substrate bias and $H_2$ annealing
- Liu, Yan-Yan (Wonkwang Univ. WRISS, School of Electrical Electronic and Information Engineering) ;
- So, Byung-Moon (National Iksan Uni.) ;
- Park, Choon-Bae (Wonkwang Univ. WRISS, School of Electrical Electronic and Information Engineering)
- 발행 : 2008.11.06
초록
Al, N-codoped ZnO(ZnO:N,Al) thin films were deposited on n-type Si(100) substrate at