한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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- Pages.302-303
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- 2008
Effect of substrate bias on electrical property of ZnO films deposited by magnetron sputtering
- Jin, Hu-Jie (Wonkwang Univ. WRISS, School of Electrical Electronic and Information Engineering) ;
- So, Soon-Jin (Knowledge On Inc.) ;
- Park, Choon-Bae (Wonkwang Univ. WRISS, School of Electrical Electronic and Information Engineering)
- 발행 : 2008.11.06
초록
Nominally undoped (intrinsic) ZnO thin films were deposited by magnetron sputtering system with utilization of substrate bias on silicon at