한국광학회:학술대회논문집 (Proceedings of the Optical Society of Korea Conference)
- 한국광학회 2008년도 하계학술발표회 논문집
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- Pages.61-63
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- 2008
Holographic femtosecond laser processing
- Hayasaki, Yoshio (Utsunomiya University Center for Optical Research and Education (CORE))
- 발행 : 2008.07.01
초록
Parallel femtosecond laser processing using a computer-generated hologram (CGH) displayed on a liquid crystal spatial light modulator (LCSLM) is demonstrated. The use of the LCSLM enables to perform an arbitrary and variable patterning. This holographic femtosecond laser processing has advantages of high throughput and high light-use efficiency. A critical issue is to precisely control the intensities of the diffraction peaks of the CGH. We demonstrate some methods for the control of the diffraction peaks. We also demonstrate the laser processing with two-dimensional and three-dimensional parallelism.
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