한국정보통신학회:학술대회논문집 (Proceedings of the Korean Institute of Information and Commucation Sciences Conference)
- 한국해양정보통신학회 2008년도 춘계종합학술대회 A
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- Pages.59-62
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- 2008
2.5 GHz ZnO-based FBAR Devices and Their Thermal Improvements
- Mai, Linh (Information and Communications University) ;
- Pham, Van-Su (Information and Communications University) ;
- Yoon, Gi-Wan (Information and Communications University)
- 발행 : 2008.05.30
초록
In this paper, we study ZnO-based a film bulk acoustic resonator (FBAR) using a multi-layered Bragg reflector. We insert chromium adhesion layers of 0.03 mm-thick to the Bragg reflector and improve the performance using thermal treatments. At operating frequency about 2.5 GHz, excellent resonance characteristics are observed in terms of good return loss and high quality factor.