Proceedings of the Korean Institute of Information and Commucation Sciences Conference (한국정보통신학회:학술대회논문집)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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2.5 GHz ZnO-based FBAR Devices and Their Thermal Improvements

  • Mai, Linh (Information and Communications University) ;
  • Pham, Van-Su (Information and Communications University) ;
  • Yoon, Gi-Wan (Information and Communications University)
  • Published : 2008.05.30
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Abstract

In this paper, we study ZnO-based a film bulk acoustic resonator (FBAR) using a multi-layered Bragg reflector. We insert chromium adhesion layers of 0.03 mm-thick to the Bragg reflector and improve the performance using thermal treatments. At operating frequency about 2.5 GHz, excellent resonance characteristics are observed in terms of good return loss and high quality factor.

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