Proceedings of the KSME Conference (대한기계학회:학술대회논문집)

The Korean Society of Mechanical Engineers (대한기계학회)
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Dynamic Analysis of a 4-Axis Nano Imprinting Stage Mechanism considering Flexibility

유연성을 고려한 4축 나노임프린팅 스테이지의 동적 해석

  • 박성빈 (국민대학교 자동차전문대학원 차체 및 샤시) ;
  • 정재일 (국민대학교 기계자동차공학부) ;
  • 임홍재 (국민대학교 기계자동차공학부)
  • Published : 2008.11.05
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Abstract

A nano-imprinting stage has been widely used in various fields of nano-technology. In this study, A 4-axis nano-imprinting stage is modeled with using the 3D-CAD Tool. Structural components such as an upper-plate, bearings and cross-roller-guides are modeled with finite elements to analyze flexibility effect during the precision stage motion. In addition, Dynamic analysis is executed to reproduce actual motion of 4-axis nano imprinting stage.

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