Model Order Reduction Using Moment-Matching Method Based on Krylov Subspace and Its Application to FRF Calculation for Array-Type MEMS Resonators

Krylov 부공간에 근거한 모멘트일치법을 이용한 모델차수축소법 및 배열형 MEMS 공진기 주파수응답함수 계산에의 응용

One of important factors in designing array-type MEMS resonators is obtaining a desired frequency response function (FRF) within a specific range. In this paper Krylov subspace-based model order reduction using moment-matching with non-zero expansion points is represented to calculate the FRF of array-type resonators. By matching moments at a frequency around a specific range of the array-type resonators, required FRFs can be efficiently calculated with significantly reduced systems regardless of their operating frequencies. In addition, because of the characteristics of moment-matching method, a minimal order of reduced system with a specified accuracy can be determined through an error indicator using successive reduced models, which is very useful to automate the order reduction process and FRF calculation for structural optimization iterations.