Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2008.11a
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- Pages.40-44
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- 2008
Effect of surface toughness on the interfacial adhesion energy between glass wafer and UV curable polymer for different surface roughness
표면거칠기에 따른 글래스 웨이퍼와 UV 경화 폴리머사이의 계면접착 에너지 평가
- Published : 2008.11.05
Abstract
The interfacial adhesion energy between resist and a substrate is very important due to resist pull-off problems during separation of mold from a substrate in nanoimprint process. And effect of substrate surface roughness on interfacial adhesion energy is very important. In this paper, we have treated glass wafer surface using