A NUMERICAL STUDY ON A THIN FILM MANUFACTURING PROCESS USING THE CONTROL OF SURFACE ENERGY OF A MICRODROPLET

미세액적의 표면에너지 제어를 통한 박막 제조 공정에 대한 연구

Numerical simulation is performed for microdroplet deposition on a pre-patterned micro-structure. The level-set method for tracking the liquid-gas interface is extended to treat the immersed (or irregular-shaped) solid surface. The no-slip condition at the fluid-solid interface as well as the matching conditions at the liquid-gas interface is accurately imposed by incorporating the ghost fluid approach based on a sharp-interface representation. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to improve the patterning accuracy.